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For the Inventor, By the Inventor

Dublin, CA, United States of America

Michael G R Smith

USPTO Granted Patents = 12

Average Co-Inventor Count = 4.4

ph-index = 5

Forward Citations = 100(Granted Patents)


Location History:

  • Alameda, CA (US) (2001)
  • San Ramon, GB (2011)
  • Dublin, CA (US) (2003 - 2012)

Company Filing History:

goldMedal12 out of 3,768 
 
Lam Research Corporation
 patents

Years Active: 2001-2025

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12 patents (USPTO):
1. 12186851 - Use of vacuum during transfer of substrates (2025-01-07),
2. 8236382 - Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same (2012-08-07),
3. 7909934 - Megasonic cleaning efficiency using auto-tuning of a RF generator at constant maximum efficiency (2011-03-22),
4. 7534307 - Methods for processing wafer surfaces using thin, high velocity fluid layer (2009-05-19),
5. 7406972 - Substrate proximity processing structures (2008-08-05),
6. 7389783 - Proximity meniscus manifold (2008-06-24),
7. 7383843 - Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer (2008-06-10),
8. 7293571 - Substrate proximity processing housing and insert for generating a fluid meniscus (2007-11-13),
9. 6995067 - Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiency (2006-02-07),
10. 6954993 - Concentric proximity processing head (2005-10-18),
11. 6518705 - Method and apparatus for producing uniform process rates (2003-02-11),
12. 6302966 - Temperature control system for plasma processing apparatus (2001-10-16),

Title: Michael G R Smith: Innovator in Substrate Processing Technology

Introduction

Michael G R Smith is a prominent inventor based in Dublin, California, known for his significant contributions to substrate processing technology. With a total of 12 patents to his name, he has made remarkable advancements in methods that enhance the efficiency and effectiveness of substrate handling in various applications.

Latest Patents

Among his latest patents is a method for evacuating a volume below a substrate in a substrate processing system. This innovative approach involves arranging the substrate on a lift mechanism to define a volume below it. The method initiates an evacuation step to pump down the volume, ensuring optimal conditions for substrate processing. Another notable patent focuses on a proximity substrate preparation sequence, which includes scanning the substrate surface with a meniscus and preparing it without the need for rinsing operations. These patents reflect his commitment to improving substrate processing techniques.

Career Highlights

Michael G R Smith is currently employed at Lam Research Corporation, a leading company in the semiconductor industry. His work at Lam Research has allowed him to apply his innovative ideas and contribute to the development of cutting-edge technologies in substrate processing.

Collaborations

Throughout his career, Michael has collaborated with talented individuals such as Michael Ravkin and Carl Woods. These collaborations have fostered an environment of innovation and have led to the successful development of new technologies in the field.

Conclusion

Michael G R Smith is a distinguished inventor whose work in substrate processing technology has made a significant impact on the industry. His innovative patents and contributions continue to shape the future of substrate handling and processing.

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