The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2011
Filed:
Aug. 31, 2005
Applicants:
John Boyd, Ottawa, CA;
Andras Kuthi, Thousand Oaks, CA (US);
Michael G. R. Smith, San Ramon, GB;
Thomas W. Anderson, Hayward, CA (US);
William Thie, Sunnyvale, CA (US);
Inventors:
John Boyd, Ottawa, CA;
Andras Kuthi, Thousand Oaks, CA (US);
Michael G. R. Smith, San Ramon, GB;
Thomas W. Anderson, Hayward, CA (US);
William Thie, Sunnyvale, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); B08B 7/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer.