The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2005
Filed:
Jun. 30, 2004
Applicants:
Michael G. R. Smith, Dublin, CA (US);
Michael Ravkin, Sunnyvale, CA (US);
Robert J. O'donnell, Fremont, CA (US);
Inventors:
Michael G. R. Smith, Dublin, CA (US);
Michael Ravkin, Sunnyvale, CA (US);
Robert J. O'Donnell, Fremont, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B005/04 ;
U.S. Cl.
CPC ...
Abstract
In one of the many embodiments, a method for processing a substrate is disclosed which includes generating a first fluid meniscus and a second fluid meniscus at least partially surrounding the first fluid meniscus wherein the first fluid meniscus and the second fluid meniscus are generated on a surface of the substrate.