The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2009
Filed:
May. 30, 2008
Michael Ravkin, Sunnyvale, CA (US);
Michael G. R. Smith, Dublin, CA (US);
John M. DE Larios, Palo Alto, CA (US);
Fritz Redeker, Fremont, CA (US);
Mikhail Korolik, San Jose, CA (US);
Christian Dipietro, Sunnyvale, CA (US);
Michael Ravkin, Sunnyvale, CA (US);
Michael G. R. Smith, Dublin, CA (US);
John M. de Larios, Palo Alto, CA (US);
Fritz Redeker, Fremont, CA (US);
Mikhail Korolik, San Jose, CA (US);
Christian DiPietro, Sunnyvale, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Among the many embodiment, in one embodiment, a method for processing a substrate is disclosed which includes generating a fluid layer on a surface of the substrate, the fluid layer defining a fluid meniscus. The generating includes moving a head in proximity to the surface, applying a fluid from the head to the surface while the head is in proximity to the surface of the substrate to define the fluid layer, and removing the fluid from the surface through the proximity head by a vacuum. The fluid travels along the fluid layer between the head and the substrate at a velocity that increases as the head is in closer proximity to the surface.