The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2008
Filed:
Apr. 01, 2004
Carl Woods, Aptos, CA (US);
Michael G. R. Smith, Dublin, CA (US);
John Parks, Hercules, CA (US);
James P. Garcia, Santa Clara, CA (US);
John M. DE Larios, Palo Alto, CA (US);
Carl Woods, Aptos, CA (US);
Michael G. R. Smith, Dublin, CA (US);
John Parks, Hercules, CA (US);
James P. Garcia, Santa Clara, CA (US);
John M. de Larios, Palo Alto, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An apparatus for processing a substrate is provided which includes a first manifold module to generate a fluid meniscus on a substrate surface. The apparatus also includes a second manifold module to connect with the first manifold module and also to move the first manifold module into close proximity to the substrate surface to generate the fluid meniscus.