The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Mar. 30, 2006
Jeffrey J. Farber, Delmar, NY (US);
Ji Zhu, El Cerrito, CA (US);
Carl Woods, Aptos, CA (US);
John M. DE Larios, Palo Alto, CA (US);
Jeffrey J. Farber, Delmar, NY (US);
Ji Zhu, El Cerrito, CA (US);
Carl Woods, Aptos, CA (US);
John M. de Larios, Palo Alto, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An apparatus used to supply a force onto a cleaning solution for processing a substrate for cleaning surface contaminants is disclosed. The apparatus includes a force applicator and a gate. The force applicator is configured to be adjusted to a first height off the surface of the substrate. The gate is positioned adjacent to a trailing point of the force applicator and is configured to be adjusted to a second height off of the surface of the substrate to enable planarization of the cleaning solution as the solution moves to the trailing point.