The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Jun. 28, 2004
Yezdi Dordi, Palo Alto, CA (US);
Bob Maraschin, Cupertino, CA (US);
John Boyd, Atascadero, CA (US);
Fred C. Redeker, Fremont, CA (US);
Carl Woods, Aptos, CA (US);
Yezdi Dordi, Palo Alto, CA (US);
Bob Maraschin, Cupertino, CA (US);
John Boyd, Atascadero, CA (US);
Fred C. Redeker, Fremont, CA (US);
Carl Woods, Aptos, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
First and second electrodes are disposed at first and second locations, respectively, proximate to a periphery of a wafer support, wherein the first and second location are substantially opposed to each other relative to the wafer support. Each of the first and second electrodes can be moved to electrically connect with and disconnect from a wafer held by the wafer support. An anode is disposed over and proximate to the wafer such that a meniscus of electroplating solution is maintained between the anode and the wafer. As the anode moves over the wafer from the first location to the second location, an electric current is applied through the meniscus between the anode and the wafer. Also, as the anode is moved over the wafer, the first and second electrodes are controlled to connect with the wafer while ensuring that the anode does not pass over an electrode that is connected.