The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
May. 21, 2007
Aleksander Owczarz, San Jose, CA (US);
Robert Knop, Fremont, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Carl A. Woods, Aptos, CA (US);
Aleksander Owczarz, San Jose, CA (US);
Robert Knop, Fremont, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Carl A. Woods, Aptos, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A substrate holding and transporting assembly is disclosed. The substrate holding and transporting assembly includes a base plate and a pair of clamps connected to the base plate in a spaced apart orientation, the spaced apart orientation of the pair of clamps enable support of a substrate with at least two independent points. The substrate holding and transporting assembly also includes an electrode assembly connected to the base plate at a location that is substantially between the pair of clamps. The electrode assembly defined to impart an electrical contact to the substrate when present and held by the pair of clamps.