Danbury, CT, United States of America

Atanu Das

USPTO Granted Patents = 7 

Average Co-Inventor Count = 4.5

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2021-2025

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7 patents (USPTO):

Title: Atanu Das: Innovator in Microelectronics

Introduction

Atanu Das is a prominent inventor based in Danbury, CT (US), known for his significant contributions to the field of microelectronics. With a total of five patents to his name, he has made remarkable advancements in etching and cleaning processes for microelectronic devices.

Latest Patents

One of Atanu's latest patents is titled "Method and composition for etching molybdenum." This patent describes an etchant composition and method for etching molybdenum from a microelectronic device at an etch rate. The etchant composition comprises at least one oxidizing agent, at least one oxidizing agent stabilizer, and at least one base, with a pH ranging from 7.5 to 13. This innovative composition selectively removes molybdenum at an etch rate of 5-200 µm/min. Another notable patent is "Compositions and methods for removing ceria particles from a surface." This patent outlines a removal composition and process for cleaning post-chemical mechanical polishing (CMP) contaminants and ceria particles from a microelectronic device. The composition effectively removes ceria particles and CMP contaminant material without compromising the integrity of low-k dielectric, silicon nitride, or tungsten-containing materials.

Career Highlights

Atanu Das is currently employed at Entegris, Inc., where he continues to develop innovative solutions for the microelectronics industry. His work focuses on enhancing the efficiency and effectiveness of processes used in the manufacturing of microelectronic devices.

Collaborations

Atanu collaborates with several talented individuals, including Michael L. White and Daniela White. Their combined expertise contributes to the advancement of technologies in the microelectronics sector.

Conclusion

Atanu Das is a key figure in the field of microelectronics, with a strong portfolio of patents that reflect his innovative spirit and dedication to improving manufacturing processes. His contributions continue to shape the future of microelectronics technology.

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