The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2026
Filed:
Oct. 01, 2021
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Elizabeth Thomas, New Milford, CT (US);
Michael L. White, Ridgefield, CT (US);
Atanu K. Das, Southbury, CT (US);
Daniela White, Ridgefield, CT (US);
Youngmin Kim, Suwon-si, KR;
Jun Liu, Newtown, CT (US);
Assignee:
Entegris, Inc., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/30 (2006.01); C11D 1/00 (2006.01); C11D 3/04 (2006.01); C11D 3/20 (2006.01); C11D 3/22 (2006.01); C11D 3/32 (2006.01); C11D 3/33 (2006.01); C11D 3/36 (2006.01); C11D 7/32 (2006.01); C11D 7/36 (2006.01); C11D 7/50 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C11D 7/3218 (2013.01); C11D 1/00 (2013.01); C11D 3/042 (2013.01); C11D 3/2006 (2013.01); C11D 3/2075 (2013.01); C11D 3/2079 (2013.01); C11D 3/2082 (2013.01); C11D 3/22 (2013.01); C11D 3/30 (2013.01); C11D 3/323 (2013.01); C11D 3/361 (2013.01); C11D 7/36 (2013.01); C11D 7/5022 (2013.01); H01L 21/02057 (2013.01); C11D 2111/22 (2024.01);
Abstract
A composition for cleaning a microelectronic device substrate is provided. The composition is useful for cleaning in-process microelectronic device substrates possessing exposed cobalt, molybdenum, copper, molybdenum, tungsten, and dielectric surfaces. Also provided is a method for cleaning such devices and a kit comprising one or more of the components of the composition.