Asagi Matsugu

Title: Asagi Matsugu: Innovator in Substrate Processing Technology

Introduction

Asagi Matsugu is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 11 patents. His innovative designs focus on improving cleaning capabilities and automating substrate handling processes.

Latest Patents

Matsugu's latest patents include a transfer apparatus, a cleaning module, and a substrate processing apparatus. The cleaning module is designed to enhance the cleaning capability for substrates with a simple structure. It features a first transfer mechanism that moves a substrate with its polished surface facing downward to a grip or release position. An ultrasonic cleaning tank is strategically placed to clean the substrate while it is in this position. The transfer machine facilitates the movement of the substrate between the grip position and the cleaning tank, while a second transfer mechanism further transports the substrate downstream.

Additionally, Matsugu has developed a substrate transporter and processing apparatus aimed at automating the conveyance of rectangular substrates. This apparatus consists of multiple conveyance rollers, roller shafts, a motor, and a pusher. The conveyance rollers support the substrate's lower surface, while the motor rotates the roller shafts. The pusher lifts the substrate off the rollers, allowing for efficient transport.

Career Highlights

Matsugu's career is marked by his dedication to advancing substrate processing technologies. His work at Ebara Corporation has positioned him as a key player in the industry. His innovative solutions have not only improved operational efficiency but have also set new standards in substrate handling.

Collaborations

Throughout his career, Matsugu has collaborated with notable colleagues, including Kenichi Kobayashi and Makoto Kashiwagi. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Asagi Matsugu's contributions to substrate processing technology exemplify his commitment to innovation and excellence. His patents reflect a deep understanding of the challenges in the industry and a drive to create effective solutions. His work continues to influence the field and inspire future advancements.