The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2025
Filed:
Jul. 09, 2019
Ebara Corporation, Tokyo, JP;
Akihiro Yazawa, Tokyo, JP;
Takashi Koba, Tokyo, JP;
Kenichi Kobayashi, Tokyo, JP;
Kenichi Akazawa, Tokyo, JP;
Fong-Jie Du, Tokyo, JP;
Makoto Kashiwagi, Tokyo, JP;
Asagi Matsugu, Tokyo, JP;
Takahiro Nanjo, Tokyo, JP;
Hideharu Aoyama, Tokyo, JP;
Takashi Mitsuya, Tokyo, JP;
Tetsuji Togawa, Tokyo, JP;
EBARA CORPORATION, Toyko, JP;
Abstract
To provide an automated apparatus for conveying a rectangular substrate. According to one embodiment, there is provided a substrate conveying apparatus for conveying the rectangular substrate. The substrate conveying apparatus includes a plurality of conveyance rollers, a plurality of roller shafts, a motor, and a pusher. The plurality of conveyance rollers are configured to support a lower surface of the substrate. To the plurality of roller shafts, the plurality of conveyance rollers are mounted. The motor is configured to rotate the plurality of roller shafts. The pusher is for lifting the substrate on the plurality of conveyance rollers such that the substrate is separated away from the plurality of conveyance rollers. The pusher includes a stage configured to pass through a clearance between the plurality of roller shafts.