Company Filing History:
Years Active: 2004-2025
Title: Akihiro Yazawa: Innovator in Substrate Processing Technology
Introduction
Akihiro Yazawa is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 10 patents. His innovative designs focus on improving cleaning capabilities and automating substrate transportation.
Latest Patents
Yazawa's latest patents include a transfer apparatus, a cleaning module, and a substrate processing apparatus. The cleaning module is designed to enhance the cleaning capability for substrates with a simple structure. It features a first transfer mechanism that transfers a substrate with its polished surface facing downward to a grip or release position. An ultrasonic cleaning tank is strategically placed to clean the substrate while it is in this position. The transfer machine facilitates the movement of the substrate between the grip position and the cleaning tank, while a second transfer mechanism moves the substrate downstream after cleaning. Additionally, his substrate processing apparatus includes a substrate transporter that automates the conveyance of rectangular substrates using conveyance rollers, roller shafts, a motor, and a pusher.
Career Highlights
Yazawa has built a successful career at Ebara Corporation, where he has been instrumental in developing advanced substrate processing technologies. His work has significantly impacted the efficiency and effectiveness of substrate cleaning and handling processes.
Collaborations
Yazawa collaborates with notable colleagues, including Kenichi Kobayashi and Kenichi Akazawa, to further enhance the innovations in substrate processing technology.
Conclusion
Akihiro Yazawa's contributions to substrate processing technology through his patents and work at Ebara Corporation highlight his role as a leading inventor in this field. His innovative solutions continue to advance the capabilities of substrate cleaning and transportation.