The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2024
Filed:
Dec. 10, 2020
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 37/005 (2012.01); B24B 37/04 (2012.01); B24B 49/12 (2006.01);
U.S. Cl.
CPC ...
B24B 37/0053 (2013.01); B24B 37/04 (2013.01); B24B 49/12 (2013.01);
Abstract
An accuracy of detecting a slip out of a substrate from a top ring is improved. A polishing unitincludes a polishing table, a top ring, a light emitting member, a slip-out detector, and an elimination mechanism. A polishing padthat polishes a substrate WF is attached to the polishing table. The top ringholds the substrate WF to press the substrate WF against the polishing pad. The light emitting memberemits a light to a detection areaon the polishing pad. The slip-out detectordetects a slip out of the substrate WF from the top ringbased on the light reflected from the detection area. The elimination mechanismeliminates a polishing liquid flowing into the detection area