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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11638980 B1

PDFFull Text
Date of Patent:
May. 02, 2023

Filed:

Mar. 20, 2020

Laminated membrane, substrate holder including laminated membrane, and substrate processing apparatus

Applicant:

Ebara Corporation, Tokyo, JP;

Inventors:

Kenichi Kobayashi, Tokyo, JP;

Asagi Matsugu, Tokyo, JP;

Makoto Kashiwagi, Tokyo, JP;

Manao Hoshina, Tokyo, JP;

Assignee:

EBARA CORPORATION, Tokyo, JP;

Attorney:

BakerHostetler

Primary Examiner:

Don M Anderson

Assistant Examiner:

Caleb Andrew Holizna

Int. Cl.
CPC ...
B24B 37/32 (2012.01); B24B 37/005 (2012.01);
U.S. Cl.
CPC ...
B24B 37/32 (2013.01); B24B 37/005 (2013.01);
Abstract

An elastic member that includes a plurality of pressure chambers is manufactured without using a mold having a complicated shape. According to one embodiment, a laminated membrane used in a substrate holder of a substrate processing apparatus is provided. Such a laminated membrane includes a first sheet material and a second sheet material disposed on the first sheet material. A part of the first sheet material is secured to a part of the second sheet material.

Find Patent Forward Citations

Kobayashi, Kenichi. (2023). Laminated membrane, substrate holder including laminated membrane, and substrate processing apparatus (U.S. Patent No. 11638980). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11638980

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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