Fremont, CA, United States of America

Anthony De La Llera

USPTO Granted Patents = 28 

 

Average Co-Inventor Count = 3.9

ph-index = 8

Forward Citations = 2,009(Granted Patents)


Location History:

  • Union City, CA (US) (2004 - 2006)
  • Fremont, CA (US) (2007 - 2023)

Company Filing History:


Years Active: 2004-2025

where 'Filed Patents' based on already Granted Patents

28 patents (USPTO):

Title: Innovations by Anthony de la Llera: A Pioneer in Semiconductor Processing

Introduction

Anthony de la Llera, based in Fremont, CA, is an accomplished inventor with an impressive portfolio of 27 patents. His work primarily focuses on innovations in semiconductor processing technology, contributing solutions that enhance the efficiency and effectiveness of gas delivery systems in plasma processing.

Latest Patents

Among his recent innovations, two notable patents stand out. The first is titled "Showerhead faceplates with angled gas distribution passages for semiconductor processing tools." This patent describes a breakthrough design of showerhead faceplates that incorporate angled gas distribution passages. These passages are aligned at oblique angles to the center axis of the faceplate, enabling tailored gas flow characteristics which optimize gas behavior during delivery to semiconductor wafers.

The second significant patent is for a "Multi-zone gas injection upper electrode system." This invention features a plasma chamber with a multi-zone gas injection upper electrode opposite a substrate support. It defines an inner plasma region with multiple concentric gas injection zones, enhancing plasma processing capabilities and providing finer control over the gas dynamics within the chamber.

Career Highlights

Anthony de la Llera has made significant contributions to his field through his role at Lam Research Corporation. His expertise in semiconductor technology and gas delivery systems has played a vital role in advancing the operational capabilities of plasma processing equipment. His innovative spirit and dedication have not only led to numerous patents but have also influenced modern semiconductor manufacturing processes.

Collaborations

Throughout his career, Anthony has had the opportunity to collaborate with esteemed professionals like Rajinder Dhindsa and Michael C. Kellogg. These collaborations have fostered an environment of innovation, allowing for the cross-pollination of ideas and the development of advanced solutions in semiconductor processing.

Conclusion

In summary, Anthony de la Llera's contributions to the field of semiconductor processing through his patents and collaborations highlight his status as an influential inventor. His work not only reflects his inventive prowess but also pushes the boundaries of technology in the semiconductor industry. With his ongoing innovations, he continues to pave the way for future advancements in this critical sector.

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