The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Sep. 14, 2012
Anthony DE LA Llera, Fremont, CA (US);
Michael C. Kellogg, Oakland, CA (US);
Alexei Marakhtanov, Albany, CA (US);
Rajinder Dhindsa, Pleasanton, CA (US);
Anthony de la Llera, Fremont, CA (US);
Michael C. Kellogg, Oakland, CA (US);
Alexei Marakhtanov, Albany, CA (US);
Rajinder Dhindsa, Pleasanton, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A gas feed insert configured to be disposed in a passage through an electrode assembly comprising a first insert end having therein a first bore aligned parallel with a linear axis of the gas feed insert. The gas feed insert further includes a second insert end opposite the first insert end, the second insert end having therein a second bore aligned parallel with the linear axis of the gas feed insert and a bore-to-bore communication channel in gas flow communication with the first bore and the second bore. The bore-to-bore communication channel is formed in an outer surface of the gas feed insert so as to prevent a line-of-sight when a gas flows from the first insert end through the bore-to-bore communication to the second insert end.