Location History:
- Pleasanton, CA (US) (2012 - 2014)
- Dublin, CA (US) (2014)
- Fremont, CA (US) (2016 - 2018)
- San Francisco, CA (US) (2017 - 2022)
- Oakland, CA (US) (2013 - 2023)
Company Filing History:
Years Active: 2012-2024
Title: Michael C. Kellogg: Innovations in Plasma Processing Technology
Introduction
Michael C. Kellogg, an accomplished inventor based in Oakland, CA, holds an impressive portfolio of 40 patents. His contributions primarily focus on plasma processing devices, showcasing significant advancements in substrate processing technologies. Kellogg's inventive spirit and dedication to innovation have made noteworthy impacts in the field of semiconductor manufacturing.
Latest Patents
Among his latest patents, one notable invention is the "Plasma processing devices having multi-port valve assemblies." This technology integrates a plasma processing chamber and a multi-port valve assembly designed to optimize gas flow management during plasma operations. The innovative design of the movable seal plate enhances operational efficiency by precisely controlling the overlap of vacuum ports in various states, ensuring optimal performance in plasma processing.
Another significant patent is the "Wafer transport assembly with integrated buffers." This invention focuses on a substrate processing system that efficiently manages the transportation of substrates within a controlled environment. The assembly encompasses process modules and gas boxes, allowing for the delivery of gas mixtures and the selective evacuation of gases. This advancement is crucial for maintaining the integrity of substrates during processing.
Career Highlights
Michael Kellogg's career has been marked by his tenure at Lam Research Corporation, where he has played a key role in developing innovative semiconductor manufacturing technologies. His expertise has led to numerous advancements in plasma processing and substrate handling systems, reflecting his commitment to enhancing the industry’s capabilities.
Collaborations
Throughout his career, Kellogg has collaborated with other talented professionals, including Rajinder Dhindsa and Alexei Marakhtanov. Together, they have driven several projects that have furthered the boundaries of plasma technologies and substrate processing methods, improving efficiency and effectiveness in semiconductor manufacturing.
Conclusion
Michael C. Kellogg's contributions to the field of plasma processing and substrate technology exemplify the spirit of innovation. With 40 patents to his name, his impact extends beyond individual inventions, influencing the broader landscape of semiconductor manufacturing. His ongoing commitment to advancement ensures that the industry continues to evolve, paving the way for future breakthroughs.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.