The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2018
Filed:
Sep. 02, 2015
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Michael C. Kellogg, San Francisco, CA (US);
Andrew C. Lee, Daly City, CA (US);
Christopher J. Pena, Hayward, CA (US);
Assignee:
Lam Researech Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B23P 19/04 (2006.01); B23P 19/10 (2006.01); B23P 19/12 (2006.01); H01L 21/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
B23P 19/10 (2013.01); B23P 19/12 (2013.01); H01L 21/00 (2013.01); H01L 21/02 (2013.01); B23P 19/04 (2013.01); Y10T 29/49895 (2015.01); Y10T 29/49899 (2015.01); Y10T 29/49902 (2015.01);
Abstract
Component-locating templates or masks for use with positioning fluid-flow components on monolithic ceramic substrates are provided, as well as techniques for the manufacture of such templates.