Christopher J Pena

Title: The Innovative Mind of Christopher J. Pena: A Look at His Contributions to Substrate Processing Technology

Introduction: Christopher J. Pena, an accomplished inventor based in Hayward, California, has made significant strides in the field of substrate processing technology. With a robust portfolio of 11 patents, his inventive approach has led to advancements in wafer transport assemblies that enhance efficiency and functionality in various industrial applications.

Latest Patents: Among his latest innovations are two notable patents focused on wafer transport assemblies with integrated buffers. The first patent describes a substrate processing system that encompasses a substrate transport assembly designed to maintain a controlled environment. This assembly transports substrates to and from two process modules through a continuous transport volume. Additionally, a sophisticated gas delivery and exhaust system ensures optimal processing conditions within the modules.

The second patent further develops the wafer transport assembly, incorporating a service tunnel that extends below the assembly along the longitudinal axis of the substrate processing tool. This design improves accessibility and maintenance while maintaining the integrity of the substrate processing operations.

Career Highlights: Christopher's career features prominent work with Lam Research Corporation, a leading company in the semiconductor industry. His contributions there have solidified his reputation as an innovator in the field.

Collaborations: Throughout his career, Christopher has collaborated with talented peers like Michael C. Kellogg and John Edward Daugherty. These partnerships have enhanced his projects, allowing for the cross-pollination of ideas and further advancements in technology.

Conclusion: Christopher J. Pena stands out as a visionary inventor whose work in substrate processing technology has revolutionized the industry. With a total of 11 patents to his name, he continues to contribute valuable innovations that pave the way for future advancements in the field. His commitment to excellence and collaboration demonstrates the potential for ingenuity in technology and its applications.