The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
Oct. 20, 2015
Lam Research Corporation, Fremont, CA (US);
David Trussell, Fremont, CA (US);
John Daugherty, Fremont, CA (US);
Michael Kellogg, Fremont, CA (US);
Christopher Pena, Fremont, CA (US);
Richard Gould, Fremont, CA (US);
Klay Kunkel, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A system for processing substrates is provided, comprising: a wafer transport assembly that is configured to transport wafers to and from one or more process modules, the wafer transport assembly having at least one wafer transport module, wherein lateral sides of the at least one wafer transport module are configured to couple to the one or more process modules; a service floor defined below the wafer transport assembly, the service floor being defined at a height that is less than a height of a fabrication facility floor in which the system is disposed.