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For the Inventor, By the Inventor

San Jose, CA, United States of America

Anantha K Subramani

LinkedIn
USPTO Granted Patents = 85 

 

Average Co-Inventor Count = 4.6

ph-index = 11

Forward Citations = 454(Granted Patents)

DiyaCoin DiyaCoin = 0.58 


Inventors with similar research interests:


Location History:

  • San Jose, CA (US) (2000 - 2024)
  • Sunnyvale, CA (US) (2024)

Company Filing History:

goldMedal85 out of 13,684 
 
Applied Materials, Inc.
 patents

Years Active: 2000-2025

where 'Filed Patents' based on already Granted Patents

85 patents (USPTO):
1. 12282256 - Photoresist deposition using independent multichannel showerhead (2025-04-21),
2. 12170186 - Showerhead assembly with heated showerhead (2024-12-17),
3. 12142458 - Symmetric plasma source to generate pie-shaped treatment (2024-11-12),
4. 12012652 - Single process volume to perform high-pressure and low-pressure processes with features to reduce cross-contamination (2024-06-18),
5. 11982359 - Isolation valve (2024-05-14),
6. 11946140 - Hot showerhead (2024-04-02),
7. 11830710 - Internally divisible process chamber using a shutter disk assembly (2023-11-28),
8. 11823871 - Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool (2023-11-21),
9. 11802340 - UHV in-situ cryo-cool chamber (2023-10-31),
10. 11600476 - Deposition system with multi-cathode and method of manufacture thereof (2023-03-07),
11. 11575071 - Oxygen controlled PVD ALN buffer for GAN-based optoelectronic and electronic devices (2023-02-07),
12. 11545347 - Internally divisible process chamber using a shutter disk assembly (2023-01-03),
13. 11446740 - Multiple sequential linear powder dispensers for additive manufacturing (2022-09-20),
14. 11371148 - Fabricating a recursive flow gas distribution stack using multiple layers (2022-06-28),
15. 11368003 - Seamless electrical conduit (2022-06-21),

Title: Anantha K Subramani: Innovator in Plasma Technology and Showerhead Systems

Introduction

Anantha K Subramani is a prominent inventor based in San Jose, California, recognized for his contributions to the fields of plasma technology and innovative shower systems. With an impressive portfolio of 84 patents to his name, Anantha has consistently pushed the boundaries of engineering and design in his industry.

Latest Patents

Among his latest inventions are a showerhead assembly featuring a heated showerhead and a plasma source assembly. The showerhead assembly incorporates a heater and a gas diffusion plate with numerous channels for optimal gas distribution. It also includes an ion filter designed with channels extending through it, providing efficient function. Additionally, a thermally conductive heat transfer ring is integrated to enhance performance between the heated showerhead and the filter. His plasma source assembly features a housing with an RF hot electrode and multiple source electrodes, culminating in innovative processing chambers that utilize these assemblies for advanced applications.

Career Highlights

Anantha currently works at Applied Materials, Inc., a company renowned for its role in the semiconductor manufacturing industry. His work has significantly influenced the integration of advanced technology in various applications, directly impacting the efficiency and functionality of modern devices.

Collaborations

Throughout his career, Anantha has collaborated with talented individuals such as Ashish Goel and John C Forster, working in tandem to develop pioneering technologies that enhance both application efficiency and user experience.

Conclusion

Anantha K Subramani's contributions to innovation, particularly in the realms of plasma technology and innovative shower systems, showcase his commitment to progress and excellence in engineering. His 84 patents exemplify a dedication to solving complex problems and improving the functionality of everyday products. As a recognized inventor, Anantha's work will continue to inspire future innovations in technology.

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