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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11802340 B1

PDFFull Text
Date of Patent:
Oct. 31, 2023

Filed:

Dec. 12, 2017

Uhv in-situ cryo-cool chamber

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Bharath Swaminathan, San Jose, CA (US);

John Mazzocco, San Jose, CA (US);

Hanbing Wu, Millbrae, CA (US);

Ashish Goel, Karnataka, IN;

Anantha K. Subramani, San Jose, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

Servilla Whitney LLC

Primary Examiner:

Len Tran

Assistant Examiner:

Kirstin U Oswald

Int. Cl.
CPC ...
C23C 16/46 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
C23C 16/466 (2013.01); C23C 16/4586 (2013.01); C23C 16/45527 (2013.01); H01L 21/67098 (2013.01); H01L 21/67109 (2013.01); H01L 21/67167 (2013.01); H01L 21/67184 (2013.01); H01L 21/67201 (2013.01); H01L 21/68721 (2013.01); H01L 21/68728 (2013.01); H01L 21/68742 (2013.01); H01L 21/68785 (2013.01);
Abstract

A cooling chamber comprising a support plate connected to a cryo pump and turbo pump, a clamp ring with a plurality of clamp pads on the bottom thereof where each clamp pad has a beveled surface directed downward and a lift plate to move the clamp ring from a clamp position to a loading position are described. Cluster tools incorporating the cooling chamber and methods of using the cooling chamber are also described.

Find Patent Forward Citations

Swaminathan, Bharath. (2023). Uhv in-situ cryo-cool chamber (U.S. Patent No. 11802340). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11802340

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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