Company Filing History:

25 out of 2,874

Hitachi-high-technologies Corporation

patents

1 out of 1,134

Hitachi High-tech Corporation

patents

Years Active: 2005-2023

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26 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11710619 - Vacuum processing apparatus (2023-07-25),

2. 10103007 - Plasma processing apparatus with gas feed and evacuation conduit (2018-10-16),

3. 8897906 - Wafer processing based on sensor detection and system learning (2014-11-25),

4. 8740011 - Vacuum processing apparatus (2014-06-03),

5. 8569177 - Plasma processing apparatus and plasma processing method (2013-10-29),

6. 8460467 - Vacuum processing apparatus (2013-06-11),

7. 8286822 - Vacuum processing apparatus (2012-10-16),

8. 8216420 - Plasma processing apparatus (2012-07-10),

9. 8148268 - Plasma treatment apparatus and plasma treatment method (2012-04-03),

10. 8100620 - Vacuum processing apparatus (2012-01-24),

11. 8048259 - Vacuum processing apparatus (2011-11-01),

12. 7976632 - Vacuum processing apparatus (2011-07-12),

13. 7833382 - Vacuum processing apparatus (2010-11-16),

14. 7828928 - Vacuum processing apparatus (2010-11-09),

15. 7807581 - Plasma processing apparatus and plasma processing method (2010-10-05),

Title: The Innovative Journey of Akitaka Makino

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