The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Jul. 06, 2011
Applicants:
Akitaka Makino, Hikari, JP;
Youji Takahashi, Kudamatsu, JP;
Minoru Soraoka, Shunan, JP;
Hideki Kihara, Kudamatsu, JP;
Susumu Tauchi, Shunan, JP;
Inventors:
Akitaka Makino, Hikari, JP;
Youji Takahashi, Kudamatsu, JP;
Minoru Soraoka, Shunan, JP;
Hideki Kihara, Kudamatsu, JP;
Susumu Tauchi, Shunan, JP;
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); C23C 16/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
Abstract
A vacuum processing apparatus includes a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas, and a mass flow controller unit interposed between two of the processing chambers for supplying gas to the chambers.