Location History:
- Tokyo, JP (2009 - 2015)
- Machida, JP (2019)
Company Filing History:
Years Active: 2009-2019
Title: Akihito Anpo: Innovator in Charged Particle Beam Technology
Introduction
Akihito Anpo is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 18 patents. His work has advanced the capabilities of lithography and inspection methods, making him a key figure in his industry.
Latest Patents
Among his latest patents are the "Charged Particle Beam Writing Apparatus" and the "Charged Particle Beam Writing Method." This apparatus includes a unit that generates first blocks in a writing region, where writing groups using different base doses are to be written. It also features a unit for generating second blocks for proximity effect correction, a unit for calculating area density in each of the first blocks, and a unit for performing a weighting calculation on the area density. Additionally, it calculates a dose coefficient for proximity effect correction and determines the dose using the base dose of each group and the corresponding dose coefficient.
Another notable patent is the "Charged Particle Beam Lithography Apparatus, Inspection Apparatus and Inspection Method of Pattern Writing Data." This method involves creating an area map of a figure pattern written on a target object for each modulation rate. It inspects the amount of electric charge for each predetermined region when a pattern is written on the target object using the pattern writing data.
Career Highlights
Akihito Anpo is currently employed at Nuflare Technology, Inc., where he continues to innovate in the field of charged particle beam technology. His expertise has led to advancements that are crucial for modern lithography processes.
Collaborations
He has collaborated with notable coworkers such as Shigehiro Hara and Hitoshi Higurashi, contributing to various projects that enhance the capabilities of charged particle beam applications.
Conclusion
Akihito Anpo's contributions to charged particle beam technology have established him as a leading inventor in his field. His innovative patents and ongoing work at Nuflare Technology, Inc. continue to shape the future of lithography and inspection methods.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.