The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2012
Filed:
Jun. 16, 2010
Hayato Shibata, Numazu, JP;
Hitoshi Higurashi, Kanagawa, JP;
Akihito Anpo, Tokyo, JP;
Jun Yashima, Kanagawa, JP;
Shigehiro Hara, Kanagawa, JP;
Susumu Oogi, Kanagawa, JP;
Hayato Shibata, Numazu, JP;
Hitoshi Higurashi, Kanagawa, JP;
Akihito Anpo, Tokyo, JP;
Jun Yashima, Kanagawa, JP;
Shigehiro Hara, Kanagawa, JP;
Susumu Oogi, Kanagawa, JP;
NuFlare Technology, Inc., Numazu-shi, JP;
Abstract
A charged particle beam drawing apparatus for drawing patterns corresponding to figures in a drawing data, has a portion for dividing a drawing area on the workpiece into block frames, a portion for combining at least a first block frame and a second block frame into a virtual block frame, and a portion for transferring a data of the virtual block frame from an input data dividing module to a common memory of a first converter and a second converter. The first converter converts a data of a first figure included in the first block frame into a first drawing apparatus internal format data. The second converter converts a data of a second figure included in the second block frame into a second drawing apparatus internal format data. The first figure and the second figure are included in a cell extending over the first block frame and the second block frame.