Location History:
- Kanagawa-ken, JP (2001)
- Kanagawa, JP (2009 - 2012)
- Yokohama, JP (1997 - 2017)
Company Filing History:
Years Active: 1997-2017
Title: Hitoshi Higurashi: Innovator in Charged Particle Beam Technology
Introduction
Hitoshi Higurashi is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 17 patents. His work has advanced the capabilities of charged particle beam writing apparatuses and methods, which are crucial in various technological applications.
Latest Patents
Higurashi's latest patents include a charged particle beam writing apparatus and a charged particle beam writing method. The apparatus features circuitry designed to set and manage the movement of a charged particle beam across multiple small regions. It includes functionalities for determining the existence of assigned shot figures within these regions and generating a map for each chip based on the measured data. Additionally, he has developed an apparatus for inspecting overlapping figures, which inspects the existence of overlaps between multiple chips based on arrangement data. This innovation enhances the precision and efficiency of chip manufacturing processes.
Career Highlights
Throughout his career, Hitoshi Higurashi has worked with notable companies such as Nuflare Technology, Inc. and Toshiba Corporation. His experience in these organizations has allowed him to refine his expertise in charged particle beam technology and contribute to groundbreaking advancements in the field.
Collaborations
Higurashi has collaborated with esteemed colleagues, including Shigehiro Hara and Akihito Anpo. These partnerships have fostered a collaborative environment that has led to innovative solutions in charged particle beam applications.
Conclusion
Hitoshi Higurashi's contributions to charged particle beam technology have established him as a leading inventor in his field. His patents and career achievements reflect his dedication to innovation and excellence in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.