The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2010
Filed:
Aug. 14, 2007
Akihito Anpo, Tokyo, JP;
Jun Kasahara, Kanagawa, JP;
Hitoshi Higurashi, Kanagawa, JP;
Shigehiro Hara, Kanagawa, JP;
Akihito Anpo, Tokyo, JP;
Jun Kasahara, Kanagawa, JP;
Hitoshi Higurashi, Kanagawa, JP;
Shigehiro Hara, Kanagawa, JP;
NuFlare Technology, Inc., Numazu-shi, JP;
Abstract
A generation apparatus of writing error verification data for a pattern writing apparatus includes a data extraction part configured to extract, from layout data including a figure pattern to be written, part of the layout data required for an operation of a function having a writing error occurred after starting writing by the pattern writing apparatus which performs writing on a target workpiece based on the layout data, and a verification data generation part configured to perform a merge process based on extracted part of the layout data, and to generate writing error verification data, for which the merge process has been performed, for verifying the writing error of the pattern writing apparatus.