The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2009
Filed:
Sep. 05, 2006
Jun Kasahara, Kanagawa, JP;
Shigehiro Hara, Kanagawa, JP;
Hitoshi Higurashi, Kanagawa, JP;
Akihito Anpo, Tokyo, JP;
Jun Kasahara, Kanagawa, JP;
Shigehiro Hara, Kanagawa, JP;
Hitoshi Higurashi, Kanagawa, JP;
Akihito Anpo, Tokyo, JP;
NuFlare Technology, Inc., Numazu-shi, JP;
Abstract
A creation method of charged particle beam writing data for writing a pattern using a charged particle beam based on design data of circuits includes creating, based on the design data, a location data file including location data, as part of the writing data, the location data being defined for locating one of a plurality of pattern data composed of one or more elementary patterns in each block area of a plurality of block areas, the plurality of block areas being made by virtually dividing a writing area, creating, based on the design data, a pattern data file including pattern data composed of one or more elementary patterns, as part of the writing data, and creating, based on the design data, a link file including link data for linking each of the location data and each of the pattern data, as part of the writing data.