Location History:
- El Cerrito, CA (US) (2002 - 2004)
- Fremont, CA (US) (2005 - 2020)
Company Filing History:
Years Active: 2002-2020
Title: Innovations of Aaron Eppler
Introduction
Aaron Eppler is a prominent inventor based in Fremont, California. He has made significant contributions to the field of wafer processing technology, holding a total of 16 patents. His work focuses on improving the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of his latest patents is titled "System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameter." This patent discloses a system for controlling conditions within a wafer processing chamber. The system includes memory and a first controller that determines non-uniformities in a substrate processing parameter associated with various control elements arranged throughout the chamber. The first controller adjusts profiles based on these non-uniformities and the sensitivity of the substrate processing parameter to the chamber's condition.
Another notable patent is "Spacer profile control using atomic layer deposition in a multiple patterning process." This patent describes methods and apparatuses for controlling spacer profiles using atomic layer deposition (ALD) in multi-patterning processes. It details the deposition of a silicon oxide spacer over a patterned core material and a target layer of a substrate, with specific oxidation conditions influencing the resulting profile of the silicon oxide spacer.
Career Highlights
Aaron Eppler is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has positioned him as a key player in advancing wafer processing technologies.
Collaborations
Throughout his career, Aaron has collaborated with notable colleagues, including Mukund Srinivasan and Vahid Vahedi. These collaborations have contributed to the development of innovative solutions in the semiconductor field.
Conclusion
Aaron Eppler's contributions to wafer processing technology through his patents and work at Lam Research Corporation highlight his role as a significant inventor in the semiconductor industry. His innovative approaches continue to shape the future of semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.