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Mountain View, CA, United States of America

Tencor Instruments

USPTO Granted Patents = 50

Trademarks = 5

Forward Citations = 2,783

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50 inventors (with patents filed for the assignee):

William R Wheeler (12 out of 23 patents)

Armand P Neukermans (12 out of 73 patents)

George J Kren (11 out of 34 patents)

4. Lee K Galbraith (7 out of 8 patents)

5. John L Vaught (6 out of 11 patents)

6. Michael E Fein (5 out of 79 patents)

7. Karel Urbanek (5 out of 5 patents)

8. Kenneth P Gross (4 out of 29 patents)

9. Jiri Pecen (4 out of 11 patents)

10. Stanley E Stokowski (3 out of 40 patents)

11. Mehrdad Nikoonahad (3 out of 69 patents)

12. Ralph C Wolf (3 out of 23 patents)

13. Franklin R Koenig (3 out of 8 patents)

14. Brian C Leslie (3 out of 15 patents)

15. Keith B Wells (3 out of 16 patents)

50 patents: Sort by Forward Citations

1. 5705741 - Constant-force profilometer with stylus-stabilizing sensor assembly, (1998-01-06),

2. 5633747 - Variable spot-size scanning apparatus (1997-05-27),

3. 5608526 - Focused beam spectroscopic ellipsometry method and system (1997-03-04),

4. 5604585 - Particle detection system employing a subsystem for collecting scattered (1997-02-18),

5. 5581350 - Method and system for calibrating an ellipsometer (1996-12-03),

6. 5576831 - Wafer alignment sensor (1996-11-19),

7. 5565979 - Surface scanning apparatus and method using crossed-cylinder optical (1996-10-15),

8. 5552704 - Eddy current test method and apparatus for measuring conductance by (1996-09-03),

9. 5530550 - Optical wafer positioning system (1996-06-25),

10. 5416594 - Surface scanner with thin film gauge (1995-05-16),

11. 5355212 - Process for inspecting patterned wafers (1994-10-11),

12. 5309755 - Profilometer stylus assembly insensitive to vibration (1994-05-10),

13. 5276498 - Adaptive spatial filter for surface inspection (1994-01-04),

14. 5264912 - Speckle reduction track filter apparatus for optical inspection of (1993-11-23),

15. 5248889 - Laser apparatus and method for measuring stress in a thin film using (1993-09-28),

Tencor Instruments is a leading provider of advanced measuring and inspection solutions for the semiconductor and electronics industries. With their cutting-edge technology and expertise, Tencor Instruments delivers comprehensive tools to enhance the yield and quality of semiconductor manufacturing processes. Their wide range of products includes metrology and defect inspection systems, wafer surface topography and film thickness measurement tools, and data analysis software. Tencor Instruments is committed to driving innovation and helping customers achieve higher productivity and profitability.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 2 2025

50 Patents

#52 in Mountain View, CA

#1,604 in California

#6,762 in US

#13,569 in the World

Mountain View, CA, United States of America

Tencor Instruments

Forward Citations = 2,783

50 inventors:

William R Wheeler (12 out of 23 patents)

Armand P Neukermans (12 out of 73 patents)

George J Kren (11 out of 34 patents)

4. Lee K Galbraith (7 out of 8 patents)

5. John L Vaught (6 out of 11 patents)

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