The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 1997
Filed:
Mar. 31, 1995
Applicant:
Inventors:
Ralph Johnson, Los Gatos, CA (US);
Keith Wells, Santa Cruz, CA (US);
Lee K Galbraith, San Diego, CA (US);
Assignee:
Tencor Instruments, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
356237 ;
Abstract
Light scattered from illuminated spot on a patterned wafer is first passed through a di-electric filter and then by an optical fiber bundle to a detector. The di-electric filter controls the aperture of the light that is passed to a desired azimuth angle and the optical fiber further limits the aperture.
Johnson, Ralph. (1997). Particle detection system employing a subsystem for collecting scattered (U.S. Patent No. 5604585). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5604585
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile