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Forward Citations = 364

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9 inventors (with patents filed for the assignee):

Michael Hopkins (8 out of 8 patents)

John Scanlan (5 out of 7 patents)

Kevin O'Leary (4 out of 7 patents)

4. Francisco Martinez (2 out of 3 patents)

5. Marcus Carbery (2 out of 2 patents)

6. Ciaran O'Morain (1 out of 3 patents)

7. Paul Heynen (1 out of 1 patent)

8. Barry Coonan (1 out of 1 patent)

9. Jean-Marc Overard (1 out of 1 patent)

11 patents: Sort by Forward Citations

1. 7113842 - Method for transferring process control models between plasma processing chambers (2006-09-26),

2. 7062411 - Method for process control of semiconductor manufacturing equipment (2006-06-13),

3. 7015703 - Radio frequency Langmuir probe (2006-03-21),

4. 6855209 - Plasma chamber cleaning (2005-02-15),

5. 6826489 - Fault classification in a plasma process chamber (2004-11-30),

6. 6677246 - Endpoint detection in the etching of dielectric layers (2004-01-13),

7. 6656848 - Plasma chamber conditioning (2003-12-02),

8. 6501285 - RF current sensor (2002-12-31),

9. 6469488 - Method of processing a high frequency signal containing multiple fundamental frequencies (2002-10-22),

10. 6061006 - Apparatus for sensing RF current delivered to a plasma with two (2000-05-09),

11. 5808415 - Apparatus for sensing RF current delivered to a plasma with two (1998-09-15),

Scientific Systems Research Limited (SSR) is a leading provider of advanced technological solutions for various industries. With a strong emphasis on research and innovation, SSR offers cutting-edge software and hardware products to optimize operations and improve efficiency. Our team of experts is dedicated to delivering high-quality solutions that meet the unique needs of our clients.

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USPTO Data Jan 1 1976 - Jan 6 2026

11 Patents

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Dublin, Ireland

Scientific Systems Research Limited