Barry Coonan

Title: Barry Coonan: Innovator in Plasma Chamber Conditioning

Introduction

Barry Coonan is a notable inventor based in Dublin, Ireland. He has made significant contributions to the field of plasma technology, particularly through his innovative patent related to plasma chamber conditioning. His work has implications for improving the efficiency and effectiveness of plasma processing in various applications.

Latest Patents

Coonan holds a patent for a method titled "Plasma Chamber Conditioning." This invention focuses on determining the optimum number of conditioning wafers to be run following a wet clean of the walls of an RF plasma chamber. The method is based on an electrical precursor signal, which allows for monitoring polymer build-up on the chamber wall during normal conditioning. By observing components of the fundamental RF signal, Coonan's predictive model determines the total number of wafers needed to complete the conditioning cycle after a pre-determined number has been run. This innovation enhances the operational efficiency of plasma chambers.

Career Highlights

Barry Coonan is associated with Scientific Systems Research Limited, where he applies his expertise in plasma technology. His work at the company has positioned him as a key figure in advancing plasma processing techniques. Coonan's dedication to innovation is evident in his patent and the impact it has on the industry.

Collaborations

Coonan has collaborated with notable colleagues, including John Scanlan and Kevin O'Leary. Their combined efforts contribute to the ongoing development and refinement of technologies in the field of plasma processing.

Conclusion

Barry Coonan's contributions to plasma chamber conditioning exemplify the importance of innovation in technology. His patent not only addresses current challenges but also sets the stage for future advancements in the field. Coonan's work continues to influence the industry positively.