Artane, Ireland

Marcus Carbery


Average Co-Inventor Count = 3.4

ph-index = 1

Forward Citations = 37(Granted Patents)


Location History:

  • Artane, IE (2006)
  • Dublin, IE (2006)

Company Filing History:


Years Active: 2006

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2 patents (USPTO):Explore Patents

Title: The Innovative Mind of Marcus Carbery

Introduction

Marcus Carbery, an inventive force hailing from Artane, Ireland, has made significant contributions to the field of semiconductor manufacturing. With two active patents under his name, Carbery exemplifies the spirit of innovation and problem-solving that drives advancements in technology today.

Latest Patents

Marcus Carbery's latest patents showcase his expertise in process control within the semiconductor industry. His first patent, titled "Method for Transferring Process Control Models between Plasma Processing Chambers," details a novel approach to transferring a multi-variate process control model from one RF-powered plasma processing chamber to another. This innovative method involves determining a process control model based on sensor data from a reference chamber, conducting designed experiments, and leveraging a transform matrix to facilitate smooth model transfer to the target chamber.

The second patent, "Method for Process Control of Semiconductor Manufacturing Equipment," focuses on fault identification in semiconductor tools. This method allows for monitoring tool sensor outputs to establish a fingerprint of tool states, capturing sensor data that indicates fault conditions, and building a library of such fingerprints. By comparing present tool fingerprints with those of known faults, this method effectively identifies fault conditions and estimates their effect on process output.

Career Highlights

Marcus Carbery has dedicated his career to advancing the semiconductor manufacturing sector. He is currently employed at Scientific Systems Research Limited, a company devoted to innovative technological solutions. His efforts in developing cutting-edge processes have set benchmarks within the industry, demonstrating his commitment to excellence and innovation.

Collaborations

At Scientific Systems Research Limited, Carbery collaborates closely with talented colleagues, including Kevin O'Leary and Michael Hopkins. Together, they work on various projects that push the boundaries of technology and contribute valuable insights into the field of semiconductor manufacturing.

Conclusion

Marcus Carbery's innovative contributions through his patents highlight his essential role in the semiconductor space. His systematic approach to process control and fault identification not only enhances operational efficiency but also paves the way for future advancements in technology. As he continues to collaborate with his peers and refine his methods, Carbery represents the relentless pursuit of innovation that fuels the industry today.

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