The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2004
Filed:
Dec. 06, 2001
Applicant:
Inventors:
John Scanlan, Waterford, IE;
Michael B. Hopkins, Dublin, IE;
Assignee:
Scientific Systems Research Ltd., Dublin, IE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1302 ;
U.S. Cl.
CPC ...
H01L 2/1302 ;
Abstract
In a method of manufacturing a miniature multilayer device a low open area dielectric layer is selectively etched through to an underlying conductive region using an electrically conducting medium such as a plasma The endpoint of the etch process is determined by detecting the abrupt change in capacitance across the device just as the final portion of the dielectric layer is removed.