The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2006
Filed:
Apr. 30, 2004
Applicants:
Michael Hopkins, Dublin, IE;
Paul Heynen, Dublin, IE;
Inventors:
Michael Hopkins, Dublin, IE;
Paul Heynen, Dublin, IE;
Assignee:
Scientific Systems Research Limited, Dublin, IE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
A Langmuir probe for measuring characteristics of a plasma driven by radio frequency (RF) power comprises an elongated conductorhaving an exposed tipfor insertion into an RF plasma and an outer endfor connection to external measuring circuitry. In order to reduce distortion over a range of RF frequencies, the probe includes an RF voltage dividerin series between the tip and outer end of the conductor.
Hopkins, Michael. (2006). Radio frequency langmuir probe (U.S. Patent No. 7015703). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7015703
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile