For the Inventor, By the Inventor

Enter assignee name

San Jose, CA, United States of America

Kla Instruments Corporation

USPTO Granted Patents = 46

Forward Citations = 4,740

Loading Chart...

Loading Chart...

103 inventors (with patents filed for the assignee):

Curt H Chadwick (10 out of 17 patents)

Mark Joseph Wihl (8 out of 18 patents)

Bin-Ming Benjamin Tsai (5 out of 49 patents)

4. Alan D Brodie (4 out of 35 patents)

5. Michael E Fein (4 out of 79 patents)

6. Anil A Desai (4 out of 5 patents)

7. Paul Sandland (4 out of 5 patents)

8. Yung-Ho Alex Chuang (3 out of 162 patents)

9. Richard R Simmons (3 out of 9 patents)

10. Tao-Yi Fu (3 out of 29 patents)

11. Marek Zywno (3 out of 17 patents)

12. Dan Meisburger (3 out of 5 patents)

13. Damon Floyd Kvamme (3 out of 30 patents)

14. David R Shafer (3 out of 86 patents)

15. Jack Y Jau (3 out of 3 patents)

Core Competencies:

Alignment Correction

Ultraviolet Inspection

Overlay Measurement

Defect Detection

Electron Beam Microscopy

Automated Inspection

Optical Systems

Catadioptric Imaging

Three-Dimensional Analysis

Wafer Inspection

Micro-Miniature Defects

Emission Microscopy

46 patents: Sort by Forward Citations

1. 6141038 - Alignment correction prior to image sampling in inspection systems (2000-10-31),

2. 6133576 - Broad spectrum ultraviolet inspection methods employing catadioptric (2000-10-17),

3. 6079256 - Overlay alignment measurement of wafers (2000-06-27),

4. 6078386 - Inspection system simultaneously utilizing monochromatic darkfield and (2000-06-20),

5. 6021214 - Inspection method and apparatus for the inspection of either random or (2000-02-01),

6. 5991699 - Detecting groups of defects in semiconductor feature space (1999-11-23),

7. 5956174 - Broad spectrum ultraviolet catadioptric imaging system (1999-09-21),

8. 5889593 - Optical system and method for angle-dependent reflection or transmission (1999-03-30),

9. 5822055 - Optical inspection of a specimen using multi-channel responses from the (1998-10-13),

10. 5737072 - Automated photomask inspection apparatus and method (1998-04-07),

11. 5717518 - Broad spectrum ultraviolet catadioptric imaging system (1998-02-10),

12. 5717204 - Inspecting optical masks with electron beam microscopy (1998-02-10),

13. 5665968 - Inspecting optical masks with electron beam microscopy (1997-09-09),

14. 5640237 - Method and apparatus for detecting non-uniformities in reflective (1997-06-17),

15. 5578821 - Electron beam inspection system and method (1996-11-26),

Company Overview

Kla Instruments Corporation, headquartered in San Jose, CA, specializes in advanced inspection and metrology solutions for the semiconductor and related industries. The company focuses on technologies such as image sampling, ultraviolet inspection, and overlay alignment, which are critical for ensuring the quality and precision of semiconductor manufacturing processes. Their expertise extends to electron beam microscopy and automated optical inspection, enabling effective defect detection and catadioptric imaging to enhance production efficiency and yield.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 13 2026

46 Patents

#200 in San Jose, CA

#1,791 in California

#7,597 in US

#15,110 in the World

San Jose, CA, United States of America

Kla Instruments Corporation

Forward Citations = 4,740

103 inventors:

Curt H Chadwick (10 out of 17 patents)

Mark Joseph Wihl (8 out of 18 patents)

Bin-Ming Benjamin Tsai (5 out of 49 patents)

4. Alan D Brodie (4 out of 35 patents)

5. Michael E Fein (4 out of 79 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Kla Instruments Corporation. Retrieved from https://idiyas.com/company/kla-instruments

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

Loading…