Company Filing History:
Years Active: 1986-2004
Title: **Anil A Desai: Innovator in Semiconductor Inspection Technology**
Introduction
Anil A Desai, a prominent inventor based in San Jose, California, has made significant contributions to the field of semiconductor inspection technology. With a total of five patents to his name, Desai's innovations are focused on enhancing the precision and efficiency of semiconductor wafer inspections.
Latest Patents
Among his latest patents is a groundbreaking method and system for utilizing a scanning electron microscope (SEM) in semiconductor wafer inspection. This patent introduces a sophisticated approach that incorporates a Z-stage focus, allowing the SEM to adjust its focal plane dynamically to inspect various areas of a semiconductor wafer with high accuracy. The system employs a non-contact optical sensor coupled with piezoelectric actuators to ensure the top surface of the wafer remains at the focal plane during inspections.
Another notable patent involves an advanced electron beam inspection system. This method encompasses a charged particle scanning system with an automatic inspection mechanism for microcircuit fabrication. The patented technology allows for detailed inspections of substrates by directing a charged particle beam at their surfaces and employing a variety of detectors to analyze secondary charged particles. This innovative system is designed to facilitate inspections at low beam energies and offers significant advantages when working with charge-sensitive insulating substrates.
Career Highlights
Throughout his career, Anil A Desai has worked with esteemed organizations such as Kla Instruments Corporation and Hermes Microvision, Inc. His experience in these companies has allowed him to refine his expertise in semiconductor technologies and inspection systems, ultimately leading to his successful patent registrations.
Collaborations
Desai has collaborated with notable professionals in the field, including Curt H. Chadwick and Alan D. Brodie. Their combined knowledge and experience have undoubtedly contributed to the advancement of the technologies pertaining to semiconductor inspections.
Conclusion
Anil A Desai’s contributions to semiconductor inspection innovations exemplify the critical role that inventors play in advancing technology. Through his patents and collaborations, he enhances the accuracy and efficiency of inspections, furthering the capabilities of semiconductor fabrication. His work continues to influence the industry and inspire future innovations in the field.