Dan Meisburger

Introduction

Dan Meisburger, based in San Jose, California, is a prominent inventor known for his significant contributions to the field of lithography. With a total of five patents to his name, Meisburger has played a crucial role in advancing device manufacturing technologies, particularly for semiconductor integrated circuits.

Latest Patents

Among Meisburger's latest patents is a groundbreaking **Lithography system and method for device manufacture**. This invention discloses a cost-effective lithography system that employs a continuous lithography mode of operation, allowing for exposure fields formed with single pulses of radiation. The system consists of a pulsed radiation source, an illumination system, a mask, a projection lens, and a workpiece stage that supports a workpiece with an image-bearing surface. It includes a radiation source controller and a metrology device to coordinate the mask exposure with radiation pulses, thereby achieving high throughput in manufacturing applications.

Another notable invention is his **Motion compensation system and method for lithography**. This system addresses image smear that occurs when imaging onto a moving workpiece with a single pulse of radiation. By utilizing an oscillatory motion of a mask frame that supports the mask, the invention ensures that the mask image moves in sync with the workpiece, effectively reducing image smear during exposure.

Career Highlights

Dan Meisburger's career includes significant tenures at well-known companies such as Kla Instruments Corporation and Ultratech Stepper, Inc. His work not only highlights his innovative capabilities but also demonstrates his commitment to enhancing manufacturing processes within the semiconductor industry.

Collaborations

Throughout his career, Meisburger has collaborated with notable professionals, including Alan D. Brodie and Jack Y. Jau. These collaborations have undoubtedly enriched his work and contributed to the success of his inventions.

Conclusion

Dan Meisburger stands out as a visionary inventor whose contributions to lithography systems are revolutionizing the way devices are manufactured. With a keen focus on enhancing efficiency and performance, Meisburger's innovations are paving the way for the future of semiconductor manufacturing. His dedication to advancing technology will continue to influence the industry for years to come.