Enter assignee name

EPO Patents = 5

Forward Citations = 45

Loading Chart...

18 inventors (with patents filed for the assignee):

Daniel G Stearns (2 out of 34 patents)

Henry N Chapman (2 out of 11 patents)

John S Taylor (2 out of 10 patents)

4. Donald W Sweeney (2 out of 11 patents)

5. Paul B Mirkarimi (2 out of 12 patents)

6. James Allen Folta (2 out of 16 patents)

7. Stephen P Vernon (1 out of 8 patents)

8. Eberhard A Spiller (1 out of 6 patents)

9. Anton Barty (1 out of 1 patent)

10. Claude Montcalm (1 out of 10 patents)

11. Sasa C Bajt (1 out of 9 patents)

12. William C Sweatt (49 patents)

13. Michael P Kanouff (6 patents)

14. Daniel A Tichenor (7 patents)

15. Luis J Bernardez (2 patents)

6 patents: Sort by Forward Citations

1. 7022435 - Method for the manufacture of phase shifting masks for EUV lithography (2006-04-04),

2. 6967168 - Method to repair localized amplitude defects in a EUV lithography mask blank (2005-11-22),

3. 6875543 - Etched-multilayer phase shifting masks for EUV lithography (2005-04-05),

4. 6867149 - Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale (2005-03-15),

5. 6849859 - Fabrication of precision optics using an imbedded reference surface (2005-02-01),

6. 6844272 - Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers (2005-01-18),

EUv LLC is a leading technology solutions provider specializing in innovative software development, digital marketing, and IT consulting services. With a team of experienced professionals, we help businesses achieve their goals through tailored solutions and personalized support. Our expertise lies in delivering cutting-edge solutions that drive growth and success in the ever-evolving digital landscape.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 2 2025

6 Patents

#440 in Santa Clara, CA

#10,276 in California

#43,729 in US

Santa Clara, CA, United States of America

Euv Limited Liability Corporation