Michael P Kanouff

Title: The Innovative Contributions of Michael P. Kanouff

Introduction

Michael P. Kanouff is a notable inventor based in Livermore, California, recognized for his significant contributions to the field of optics and plasma-based light sources. With a total of six patents to his name, Kanouff has developed innovative technologies that enhance the performance and reliability of illumination systems.

Latest Patents

One of Kanouff's latest patents is titled "Apparatus and methods for optics protection from debris in plasma-based light source." This invention discloses methods and apparatus for generating an illumination beam. In one embodiment, the apparatus includes a vacuum chamber designed to hold a target material, an optical element positioned within the vacuum chamber or within a wall of such vacuum chamber, and an illumination source system for generating at least one excitation source that is focused on the target in the vacuum chamber to generate a plasma. The apparatus also features a debris protection system that flows gas out of multiple nozzles and away from the optical element at a velocity directed towards the plasma, effectively preventing debris from reaching the optical element.

Another significant patent focuses on plasma-based light sources, detailing systems and methods for protecting components of the light source from debris generated by plasma. This includes target material gas, atomic vapor, high-energy ions, neutrals, micro-particles, and contaminants. The patent outlines arrangements that reduce the adverse effects of plasma-generated ions and neutrals on light source components while minimizing in-band light attenuation due to target material gas and vapor.

Career Highlights

Throughout his career, Michael P. Kanouff has worked with prominent companies such as EUV LLC and KLA-Tencor Corporation. His experience in these organizations has allowed him to refine his expertise in optics and plasma technologies, contributing to the advancement of innovative solutions in the industry.

Collaborations

Kanouff has collaborated with notable professionals in his field, including Avijit K. Ray-Chaudhuri and Alexey Kuritsyn. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Michael P. Kanouff's contributions to the field of optics and plasma-based light sources demonstrate his innovative spirit and commitment to advancing technology. His patents reflect a deep understanding of the challenges in illumination systems and provide effective solutions to enhance their performance.