Average Co-Inventor Count = 2.5

ph-index = 10

Forward Citations = 316(Granted Patents)

Company Filing History:

7 out of 15,458

University of California

Euv Limited Liability Corporation

patents

4. 1 out of 1

The Extreme Ultaviolet Lithography LLC

patent

5. 1 out of 254

The United States of America

patents

6. 1 out of 1,571

Lawrence Livermore National Security, LLC

patents

7. 1 out of 470

Colorado State University Research Foundation

patents

8. 2 out of 832,680

Other

patents

where one patent can have more than one assignee

Years Active: 1997-2021

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16 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10901121 - Planarization of optical substrates (2021-01-26),

2. 7473301 - Adhesive particle shielding (2009-01-06),

3. 7062348 - Dynamic mask for producing uniform or graded-thickness thin films (2006-06-13),

4. 6849859 - Fabrication of precision optics using an imbedded reference surface (2005-02-01),

5. 6844272 - Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers (2005-01-18),

6. 6780496 - Optimized capping layers for EUV multilayers (2004-08-24),

7. 6668207 - Method and system using power modulation and velocity modulation producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients (2003-12-23),

8. 6634760 - Low-cost method for producing extreme ultraviolet lithography optics (2003-10-21),

9. 6562404 - Conformal chemically resistant coatings for microflow devices (2003-05-13),

10. 6524449 - Method and system for producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients (2003-02-25),

11. 6425988 - Method and system using power modulation for maskless vapor deposition of spatially graded thin film and multilayer coatings with atomic-level precision and accuracy (2002-07-30),

12. 6134049 - Method to adjust multilayer film stress induced deformation of optics (2000-10-17),

13. 6056331 - Zero dead volume tube to surface seal (2000-05-02),

14. 5783130 - Fabrication method for miniature plastic gripper (1998-07-21),

15. 5644395 - Miniaturized flow injection analysis system (1997-07-01),

Title: Innovations of James Allen Folta

Introduction

James Allen Folta is a notable inventor based in Livermore, CA (US). He holds a total of 16 patents that showcase his contributions to the field of optical technology and particle shielding. His innovative methods and devices have significantly impacted various industries.

Latest Patents

One of his latest patents is titled "Planarization of Optical Substrates." This method involves creating a laser mirror by addressing nodular defects on the mirror substrate through a series of layers, including silicon dioxide and hafnium dioxide. The process aims to reduce the size of these defects to enhance the mirror's performance. Another significant patent is "Adhesive Particle Shielding," which describes an efficient device designed to capture fast-moving particles. This device features an adhesive coating on a film attached to a mounting panel, ensuring a particle-free environment in sensitive photolithographic systems.

Career Highlights

James Allen Folta has worked with prestigious organizations, including the University of California and Euv LLC. His experience in these institutions has allowed him to develop and refine his innovative ideas, contributing to advancements in technology.

Collaborations

Throughout his career, Folta has collaborated with notable individuals such as Claude Montcalm and Eberhard A. Spiller. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

James Allen Folta's contributions to innovation through his patents and collaborations highlight his significant role in advancing optical technology and particle shielding. His work continues to influence various fields, showcasing the importance of inventive thinking in solving complex challenges.

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