The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2005
Filed:
Jun. 29, 2001
Daniel G. Stearns, Los Altos, CA (US);
Donald W. Sweeney, Livermore, CA (US);
Paul B. Mirkarimi, Sunol, CA (US);
Henry N. Chapman, Livermore, CA (US);
Daniel G. Stearns, Los Altos, CA (US);
Donald W. Sweeney, Livermore, CA (US);
Paul B. Mirkarimi, Sunol, CA (US);
Henry N. Chapman, Livermore, CA (US);
The EUV Limited Liability Corporation, Santa Clara, CA (US);
Abstract
A method and apparatus are provided for the repair of an amplitude defect in a multilayer coating. A significant number of layers underneath the amplitude defect are undamaged. The repair technique restores the local reflectivity of the coating by physically removing the defect and leaving a wide, shallow crater that exposes the underlying intact layers. The particle, pit or scratch is first removed the remaining damaged region is etched away without disturbing the intact underlying layers.