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Scotts Valley, CA, United States of America

Aviza Technology Limited

USPTO Granted Patents = 29

% Expired Patents = 51.7

EPO Patents = 2

Trademarks = 2

Forward Citations = 1,437

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57 inventors (with patents filed for the assignee):

Yoshihide Senzaki (5 out of 7 patents)

Gary Proudfoot (3 out of 3 patents)

Robert Kenneth Trowell (3 out of 6 patents)

4. Gordon R Green (3 out of 12 patents)

5. John Macneil (2 out of 11 patents)

6. Andrew Price (2 out of 6 patents)

7. Jay DeDontney (2 out of 7 patents)

8. Christopher David George (2 out of 2 patents)

9. Alan Lee Starner (2 out of 7 patents)

10. Hilario L Oh (2 out of 16 patents)

11. Seung Gyun Park (2 out of 2 patents)

12. Cole Porter (2 out of 2 patents)

13. Jason Melvin (2 out of 2 patents)

14. Christopher T Ratliff (2 out of 7 patents)

15. Jeffrey M Kowalski (2 out of 3 patents)

29 patents: Sort by Forward Citations

1. 8585873 - Methods and apparatus for sputtering (2013-11-19),

2. 8486198 - Method of processing substrates (2013-07-16),

3. 8425741 - Ion deposition apparatus having rotatable carousel for supporting a plurality of targets (2013-04-23),

4. 8400063 - Plasma sources (2013-03-19),

5. 8354652 - Ion source including separate support systems for accelerator grids (2013-01-15),

6. 7732307 - Method of forming amorphous TiN by thermal chemical vapor deposition (CVD) (2010-06-08),

7. 7470470 - System and method for forming multi-component dielectric films (2008-12-30),

8. 7403089 - Magnet assemblies (2008-07-22),

9. 7351669 - Method of forming a substantially closed void (2008-04-01),

10. 7335569 - In-situ formation of metal insulator metal capacitors (2008-02-26),

11. 7282158 - Method of processing a workpiece (2007-10-16),

12. 7205247 - Atomic layer deposition of hafnium-based high-k dielectric (2007-04-17),

13. 7205246 - Forming low k dielectric layers (2007-04-17),

14. 7202167 - Method of forming a diffusion barrier (2007-04-10),

15. 7153580 - Low κ dielectric inorganic/organic hybrid films and method of making (2006-12-26),

Aviza Technology Limited is a leading provider of vertical vapor deposition (CVD), plasma etch and clean solutions used in the production of semiconductors, MEMS, advanced packaging, LEDs and other applications. Aviza's systems deliver leading process and technology solutions that enable customers to achieve high manufacturing yields and accelerate time-to-market.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Sep 29 2026

29 Patents

#10 in Scotts Valley, CA

#2,764 in California

#11,606 in US

#22,510 in the World

Scotts Valley, CA, United States of America

Aviza Technology Limited

Forward Citations = 1,437

57 inventors:

Yoshihide Senzaki (5 out of 7 patents)

Gary Proudfoot (3 out of 3 patents)

Robert Kenneth Trowell (3 out of 6 patents)

4. Gordon R Green (3 out of 12 patents)

5. John Macneil (2 out of 11 patents)

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