The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2013
Filed:
Jul. 12, 2007
Gary Proudfoot, Oxford, GB;
Gordon Robert Green, Bristol, GB;
Robert Kenneth Trowell, Bristol, GB;
Aviza Technology Limited, Newport, Wales, GB;
Abstract
This invention relates to an Ion gun () which comprises of plasma generator () driven from an RF source (), a plasma or source chamber (), having an outlet (), across which is mounted an accelerator grid (). The accelerator grid () comprises four individual grids. The first grid (), which is closest to the outlet (), is maintained at a positive voltage by a DC source (), the second grid () is maintained strongly negative by DC source (). The third grid () is maintained at a negative voltage, which is much lower than that of the second grid (), by DC source () and the fourth grid is grounded. Means of mounting these grids are also described.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile