Location History:
- Felton, CA (US) (2004)
- Scotts Valley, CA (US) (2008)
Company Filing History:
Years Active: 2004-2008
Title: Innovations by Seung Gyun Park
Introduction
Seung Gyun Park is an accomplished inventor based in Scotts Valley, CA (US). He has made significant contributions to the field of technology, particularly in the area of atomic layer deposition and wafer processing systems. With a total of two patents to his name, Park's work demonstrates a commitment to advancing innovative solutions in his industry.
Latest Patents
One of Park's latest patents is titled "System and method for forming multi-component dielectric films." This invention provides systems and methods for mixing precursors, allowing a mixture of precursors to be present together in a chamber during a single pulse step in an atomic layer deposition (ALD) process. The result is a multi-component film formed from at least one different chemical component, which creates a mono-layer and produces a dielectric film with a composition gradient.
Another notable patent is "Atmospheric pressure wafer processing reactor having an internal pressure control system and method." This invention describes an atmospheric pressure wafer processing system designed to deliver at least one gas. It features an exhaust control feedback system that utilizes sensors to measure the pressure within the system, adjusting control units to maintain desired set pressures. This innovative approach yields a more stable pressure balance for processing wafers, enhancing process repeatability over extended periods.
Career Highlights
Seung Gyun Park is currently employed at Aviza Technology Limited, where he continues to develop cutting-edge technologies. His work focuses on improving processes related to chemical vapor deposition, which is crucial for various applications in the semiconductor industry.
Collaborations
Throughout his career, Park has collaborated with notable professionals in his field, including Yoshihide Senzaki and Lawrence Duane Bartholomew. These collaborations have contributed to the advancement of technology and innovation in their respective areas of expertise.
Conclusion
Seung Gyun Park's contributions to the field of technology through his patents and work at Aviza Technology Limited highlight his role as a significant inventor. His innovative solutions in atomic layer deposition and wafer processing systems continue to impact the industry positively.