The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Jul. 06, 2007
Applicants:
Gary Proudfoot, Oxford, GB;
Christopher David George, Bristol, GB;
Paulo Eduardo Lima, Grenoble, FR;
Inventors:
Gary Proudfoot, Oxford, GB;
Christopher David George, Bristol, GB;
Paulo Eduardo Lima, Grenoble, FR;
Assignee:
Aviza Technology Limited, Newport, South Wales, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 7/24 (2006.01); H05B 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention relates to a plasma source in the form of plasma generator () which utilizes an antenna () and an RF source (). The generated plasma flows into a chamber () and ions are accelerated out of the chamber () by grid (). A bodyis located in the volume for creating local losses and thereby reducing local plasma density.