The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2013
Filed:
Jul. 06, 2007
Applicants:
Gary Proudfoot, Oxford, GB;
Christopher David George, Bristol, GB;
Paulo Edurado Lima, Gwent, GB;
Gordon Robert Green, Bristol, GB;
Robert Kenneth Trowell, Bristol, GB;
Inventors:
Gary Proudfoot, Oxford, GB;
Christopher David George, Bristol, GB;
Paulo Edurado Lima, Gwent, GB;
Gordon Robert Green, Bristol, GB;
Robert Kenneth Trowell, Bristol, GB;
Assignee:
Aviza Technology Limited, Newport, South Wales, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25B 9/00 (2006.01); C25B 13/00 (2006.01); B05B 5/025 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention relates to a broad beam ion deposition apparatus () including an ion source (), a target (), a tillable substrate table () and an auxiliary port (). The target () is in the form of a carousel which carries a number of targets and the ion source () is configured to produce a substantially rectangular section beam ().